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Christian Hobert, GLOBALFOUNDRIES
Back by popular demand, Tuesday, September 8th
16:00 Central European Time
, (8am U.S. Pacific Time)
(check your local time) |
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A key method for yield learning, is physical failure analysis. Defects being analyzed by PFA are often hidden beneath a multiple level metallization stack and can be hardly visualized from a bird’s eye view. In that situation, deconstruction processes come into play, enabling a controlled layer-by-layer removal. Copper metallization production processes, when introduced, brought new challenges to the PFA community, which needed to be solved.
In this presentation, Christian Hobert discusses his findings on deprocessing entire copper wafers instead of single dies to increase PFA productivity. | |
