Press Release

Santa Barbara, CA, USA (February 9, 2005) – MultiProbe announces our new X Series Nanoprober, combining a rock solid platform with the award-winning, high performance MultiScan™ Atomic Force Probe (AFP) for maximum tool efficiency and lab productivity. It is designed for 45nm, 65nm, 90nm and larger process technology measurements and PicoCurrent™ imaging capabilities in an intuitive, easy to use platform. The X Series reduces FA times from weeks to hours. Compatible with the entire MultiProbe suite of nanoprobing tools, this turnkey system addresses the requirements of nearly all users. This is the most effective method to measure integrated circuits and transistors in process development and failure analysis.

“The X Series Nanoprober is a major milestone in failure analysis, performing transistor probing with a degree of efficiency and reliability that was unattainable just months ago. We’re finding it difficult to ramp production to meet demand for this new product,” says Andy Erickson, president of MultiProbe.

MultiProbe’s X Series Nanoprober consists of three major components: a precision, low noise probing platform, up to four award-winning MultiScan™ AFP heads and an environmental enclosure and workstation. The X Series Nanoprober is engineered to provide an ultra stable and compact platform with a small footprint. MultiProbe has elevated the AFP heads well above the base to increase user access, greatly simplifying sample exchanges and alignment procedures. With this design, samples up to 4" (10cm) can be easily loaded onto a XYZ-θ micrometer stage and each AFP head can be positioned anywhere on the sample even to within 100nm of the other probe tips!

The MultiScan™ AFP allows the user to measure the smallest transistors with no vacuum chamber, quick sample and probe change and no threshold shifting due to charged beam exposure. The sharp probes, nano-positioning using piezo electrics, and force feedback provide a nanometer resolution map of surface structures and the ability to place the probes on the desired nodes very quickly with controlled contact force. Combining these extraordinary instruments, MultiProbe’s new X Series Nanoprober achieves new levels of productivity and performance, exceeding the demands of today’s FA engineer.

Nanoprobing electrical measurements require low drift, precision probe placement while allowing the flexibility of large range positioning. An integrated active vibration table complements the X Series Nanoprober design by canceling floor noise before it reaches the measurement units. The ergonomic equipment rack accommodates all the necessary tools within arm's reach of the analyst. Weight bearing sliding shelves and removable panels allow for easy access to the instruments from all angles. Multiple floating monitors offer clean aesthetics as well as increased workspace to the operator. The X Series Nanoprober enhances the inherent productivity of the MultiScan™ AFP with a design that anticipates the requirements of the user and fully maximizes today's technology.

MultiProbe develops and manufactures the world’s highest resolution nanoprobing tools. Companies use our instruments to characterize the smallest, high performance semiconductor devices on integrated circuits. MultiProbe is located in Santa Barbara, CA, USA. Visit our website at www.multiprobe.com or email us at info@multiprobe.com and change the way you look at transistors for generations to come.