X-Series Nanoprober (AFP)
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Overview
- The MultiProbe™ Nanoprober provides conclusive, quantitative electrical measurements. It reduces Failure Analysis (FA) times from weeks to hours. How?
- The MultiProbe™ AFP II Nanoprober combines a rock solid platform with an award-winning, high performance software system for maximum tool efficiency and lab productivity. It’s proven for 22nm and larger process technology measurements, and provides simultaneous imaging and probing capabilities in an intuitive, easy to use platform.
MultiProbe’s AFPII Nanoprober allows analysts to measure any nanoscale device, physically and electrically, without the need for a vacuum chamber. It offers quick sample and probe-change capabilities and is free from the threshold shifting effects produced by exposure to charged beams used in other tools. Its sharp probes, piezo-electric nano positioning, and force feedback provide a nanometer-resolution map of surface structures, and the ability to place up to 6 probes on the desired nodes quickly and with controlled contact force.
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Features&Benefits
FLEXIBLE MPII HEAD CONFIGURATION
A single head allows ultra low-current
A two head system provides continuity and two-terminal measurements, via chain resistance
Three heads allow transistor curves of SOI n- and p- FETS as well as bulk n-FETS
Four heads enable “Kelvin” resistance measurements
Five heads will extract full bulk-device parameters
A complete 6-head system is used for contacting all critical nodes for eDRAM |
| FEATURES | BENEFITS |
| MPII AFP Head(s) | Provides flexibility. Controls up to 6 MPII Atomic Force Probers to measure source, drain, well, gate, substrate and all critical nodes for eDRAM, with nanometer resolution. |
| PicoCurrent Channels 1-8 units |
Saves time by providing a single-image solution for fault isolation. Offers voltage ramping and Current sensing for all AFP Heads, chuck and any other auxiliary probes or test points. |
| SNAP Stage (Sample Nano-Accurate Positioning Stage) | Saves time and reduces error. Completely eliminates the need for cell counting or FIB marking. The SNAP Stage integrates with CADNav and allows users to accurately navigate to a desired site within a range of 500x500μm. |
| ∗Scanning Capacitance Imaging | Improves success rate by providing a method to detect failures that might otherwise be invisible in other microscopes. It measures implant variations, trapped charge, memory cell capacitance and a host of otherwise difficult to measure failure types. |
| XYZ and Θ Precision Movement | Increases throughput with an easy to use, widely accessible stage for sample exchange and alignment. |
| Non-Contact Imaging | Enhances FA Pocess and increases capability of lab. Designed for soft metal probing and high topography features. |
| ∗Thermal Chuck | Enhances FA Process. Provides the optimal environment for thermal intensive customer specifications. Heats to 120ºC +/-.01º |
| Guarded Chuck | Provides greater flexibility in obtaining sample measurements with reduced electrical noise. Allows users to either electrically isolate or bias the sample. |
| ∗∗22nm Probing | Gives confidence to FA labs that there is a tool available to handle the next generation of technology. |
| ∗∗SNAP Scanning | Provides greater accuracy. Allows for 25 x 25µm precision scanning anywhere within a 500µm area, while maintaining a probe separation of <500 nm. |
| ∗∗Digital Feedback Control | Enhances FA process. Replaces Analog Circuitry with high performance quick-response digital control on tip location and imaging force. |
| ∗These products are only offered with the MPDigital Control Box. ∗∗These products are currently under development and will only be offered with the MPDigital Control Box. |
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- Platform: Engineered to provide an acoustic and vibration isolated compact platform. The integrated active isolation table corrects for room and floor vibrations to ensure a high resolution AFM probing map is produced every time. Samples, up to 4” in diameter (10cm), can be easily loaded onto an XYZ micrometer stage, with a Θ adjustment. Each MP II probing head can be independently positioned anywhere on the sample. These three axis line-guided precision stages work with the AZoom optical image to handle the coarse positioning during tip exchange. The workstation monitors display this variable power analytical viewing system with up to 40X magnification on top of a changeable fixed objective.
Instrumentation Rack: An ergonomic equipment rack comes standard with an uninterrupted battery supply and a built-in, full-system shut down EMO. Rack space is allocated for a variety of customer provided hardware, including parameter analyzers, oscilloscopes, curve
tracers, power supplies and other equipment often used in electrical failure analysis. Weight-bearing sliding shelves and removable panels allow for easy access to the instruments from all angles. - Workstation: Multiple floating monitors and MultiProbe’s versatile MultiScan software offer increased workspace and the opportunity for operators to display a variety of control windows, on any monitor, in order to create a customized work experience.
- Facility Requirements: For full functionality, two single-phase outlets rated at 30A (110 or 230V) are required. Vacuum for the sample chuck is provided internally from a floor-mounted pump. (full details)