June 19th, 2013

Fault Isolation and Nanoprobing Capabilities Within a Single Tool     Multiprobe nanoprober chinese site link    Multiprobe nanoprober Japanese Link    

MPIIb Probing Head

nanoprober with probing heads

Overview

After demonstrating its effectiveness on the 45nm technology node, MultiProbe™ has designed the MPII head to go beyond 22nm devices.
The MP IIb’s laser feedback control allows users to image and probe, uninterrupted for days, without changing a single probe tip.
see a short 30 sec. video
Used in Failure Analysis (FA), Reliability, Design, and research labs around the world, the Atomic Force Prober has already proven itself as the most reliable, versatile, and capable nanoprober available.

 

FLEXIBLE MPIIb HEAD CONFIGURATION

A single head allows ultra low-current localization of defects using PicoCurrent imaging.

 

A two head system provides continuity and 2-terminal via-chain resistance measurements.

 

Three heads allows transistor curves of SOI n- and p- FETS as well as bulk n-FETS.

 

Four heads will extract full bulk-device parameters.

 

Five heads enable “Kelvin” resistance measurements.

 

A complete 6-head system is used for contacting all critical nodes for eDRAM.

See Technical Specifications