MPIIb Probing Head

Features

Detailed documentation of the MPIIb head can be found in the Customer Technical Introduction to the MPIIb probing head document.

Tech Specs

		Note
Noise	<3nm for -50dB <4nm for -40dB <5nm for -30dB	1
Lateral Resolution	5 nm	2
Vertical Resolution	5 nm	3
Scan Range	35 µm	4
Orthogonality	1 °	5
Contact Duration	10 min	6

Notes:

1. Results are based on the facility floor noise measurements taken using the MultiProbe™ site qualification procedure
2. Verified using the MultiProbe™ offset command during an image scan
3. Will image on 5nm feature height sample Results based on a noise floor less than 3nm
4. Monitoring the axial displacement for x,y and z in the ramping calibration suite
5. Measured with a 20µm scan box
6. Results based on 22nm technology after tips have been installed for 24 hours