August 28th, 2008

MP CADNav

Cad Navigation

Overview

Allows users to navigate the sample and probe it from the CAD overlay with periodic MultiProbe™ AFP scans

Imagine overlaying your CAD layout file over the AFP image for quick identification of all the contacts visible on the scan. Now imagine probing contacts that have not been imaged yet by simply placing the probes on the CAD overlay. Now you can begin to understand the power of MultiProbe’s CadNav.
MP CadNav leverages the power of SemiAuto for large scale sample positioning and SNAP for nano-accurate sample positioning and integrates it with data from industry standard CAD navigation packages such as Camelot or ChipView to provide unprecedented transistor probing capabilities.
The workflow for MP CadNav begings by performing a large 3-point alignment of the physical sample to the chip layout from the CAD navigation package. During this operation, Camelot or ChipView will take control of the SemiAuto sample stage and perform the alignment. After alignment, the user can move the chip to the region to be probed using the CAD navigation package. Once there, the user selects the relevant CAD layers and a 500x500µm section of the layout is transferred to MultiScan III.
Within the MultiScan III environment, the user performs a second 3-point alignment. This time, the CAD ovelay is aligned to the MultiProbe™ AFP images captured by MultiScan III. MultiScan III accurately controls the position of the sample using the SNAP stage.
At this point the user can navigate the sample and probe it from the CAD overlay with periodic AFP scans required for fine re-alignment of the sample to the overlay.
Requirements:


Camelot is a trademark of MAGMA, ChipView is a trademark of IBM