September 9th, 2010

Fault Isolation and Nanoprobing Capabilities Within a Single Tool     Multiprobe nanoprober chinese site link    Multiprobe nanoprober Japanese Link    

Probe Tip Styles




Types Available

MODEL Description Measurements Compatibility
AFP-130 DC Suitable for typical probing of technologies down to 130nm
<150 Ω cert. contact resistance
Standard dimensions and angles compatible with 4-probe parametric measurement requirements
AFP-065 DC Suitable for typical probing of technologies down to 65nm
<100 Ω cert. contact resistance
Standard dimensions and angles compatible with 4-probe parametric measurement requirements
AFP-045 DC Suitable for typical probing of technologies down to 45nm
<100 Ω cert. contact resistance
Standard dimensions and angles compatible with 4-probe parametric measurement requirements
AFP-035 DC Suitable for typical probing of technologies down to 22nm
<100 Ω cert. contact resistance
Standard dimensions and angles compatible with 4-probe parametric measurement requirements. These probes are only available for use with the MPIIb head.
AFM-130V Solid tungsten probes suitable for standard contact-mode SPM applications, including Tunneling-, Conductive-, and Scanning Capacitance-AFM
Typical tip radius = <150nm
Compatible with most commercially available SPM systems
AFM-065V Solid tungsten probes suitable for standard contact-mode SPM applications, including Tunneling-, Conductive-, and Scanning Capacitance-AFM
Typical tip radius = <100nm
Compatible with most commercially available SPM systems
AFM-045V Solid tungsten probes suitable for standard contact-mode SPM applications, including Tunneling-, Conductive-, and Scanning Capacitance-AFM
Typical tip radius = <50nm
Compatible with most commercially available SPM systems
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