March 11th, 2010

Fault Isolation and Nanoprobing Capabilities Within a Single Tool     Multiprobe nanoprober chinese site link    Multiprobe nanoprober Japanese Link    

afp product specifications

Ease of Use

 

Qualified technology nodes: 250nm-22nm

 

Probe touch-down: Force feedback

 

Probe motion control: Automatic, mouse positioning

 

Positioning resolution: <5nm

 

Measurement repeatability: <1mV, <100fA

 

Measurement accuracy: 500fA, better with some care.

 

Initial probe resistance: Average 40Ω

 

Tool uptime: Greater than 95%

 

MTBF: 1,000 hours

 

Installation and testing: 3 days

 

Simultaneous fault localization: PicoCurrent, SCM

 

Fault confirmation: IV Curves

 

CAD Navigation integration

 

 

atomic-force-nanoprober