August 28th, 2008

SNAP Stage

Overview

MultiProbe now offers our Sample Nano-Accurate Positioner Stage, better know as the SNAP Stage. With the decrease in the critical feature size and increase in cell density, navigating to the area of interest becomes a critical step. This cutting edge product gives the user the ability to accurately navigate to a desired site within a range of 500x500µm. The SNAP stage completely eliminates the need for cell counting or fib marking.

Features

The SNAP Stage is a compact sample stage driven by a piezo ceramic flecture and achieves its accuracy with a capacitive amplified feedback sensor. It is designed to be incorporated with the AFP II Nanoprober with use of one to six AFP Heads. The SNAP stage uses a replaceable vacuum enabled chuck that is low profile, light weight, and gives the freedom of 360 degrees of rotation. As an accessory, the chuck can be replaced with our Guarded Chuck which provides electrical isolation or biasing and can be driven by an independent SMU or PicoCurrent channel.

Tech Specs

  Only Hardware With Software
Closed loop travel (µm) 500 500
Close loop resolution (nm/bit) 11.1  
Close loop linearity (%) 0.1 0.02
Push/pull force capacity (N) 10/8 10/8
Body weight [including cables] (g) ~800 ~800
Body material Al Al
     
Accuracy (nm) ±1500 ±50*
Repeatability (nm) ±150 ±150
Drift (nm/10min) 20 20
Close loop ortogonality (% of full range) 0.04 <0.005
Velocity (µm/sec) 250 250
Settling time (s) 0.1 0.1
* for distances <50µm. For full range travel, accuracy: ±150nm